Low Voltage 0.18 um CMOS Surface Acoustic Wave Gas Sensor

1. Technology Overview

A Surface Acoustic Wave (SAW) gas sensor is disclosed in the present invention. The objective of the designed SAW Gas sensor is to detect Hydrogen Sulfide (H2S) and Nitrogen Oxides (NOx) gases. The inter-digital transducers (IDT) antennas in the sensor are coated with the thin film, tungsten trioxide (WO3), which mass is sensitive to mention gas concentrations upon close contact. The charges in WO3 mass are registered as frequency shift from 300 to 500MHz. The sensor blocks are simulated, fabricated and tested for an operating frequency of 300MHz to 350MHz. A relatively linear response is achieved with a step of 0.1V for 10MHz step frequency shift emitted from WO3 coated IDT. This fully integrated signal processing circuitry designed by 0.18um CMOS process is simple, cost-effective, small in size, has low power consumption and fast real-time operation response as well.

  • UMCIC File Number: 628/323
  • Patent: MY-158585-A
  • Patent status: Granted
  • Malaysia patent: Low Voltage 0.18 um CMOS Surface Acoustic Wave Gas Sensor
  • This technology is currently available for licensing and commercialisation.